Processes for Upgrading Metallurgical Grade Silicon to
#0183;#32;HSiCl 3 + H 2 Si(s) + 3HCl (6) Using silane (SiH 4 ) instead of TCS (SiHCl 3 ) during decomposition simplifies the process and in this process SiH 4 is decomposed according to the following reaction at #194;#176;C [2]: SiH 4 (g) = Si + H 2 (g) (7) Using silane instead of TCS during decomposition simplifies the process due to the lower boiling point of silane compared to other liquids